大学･研究開発･実験用 小型CIGS成膜装置 |
CIGS5000 series |
大学、研究、開発、実験等に最適な、小型ＣＩＧＳ成膜装置 |
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 CIGS 5000 Series as R&D equipment for compound thin film solar cell is consist of Transfer,Loadlock,MBE,back contact Sputtering and window sputtering Chambers. In CIGS series process Mo-back contact was deposited on a sodalime glass by sputtering system and the CIGS absorber layer over the Mo back contact growth technique using multi-source(Cu,In,Ga,Se)evaporation method. Then window layer consisted of Zn0 or ITO thin film is coated by RF sputtering system. |
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Deposition thickness : up to several ten thousands Å for Mo, CIGS and ZnO film Film thickness uniformity : ±5% or less on 100mm x 100mm substrate Film sheet resistance uniformity : ±5% or less on 100mm x 100mm substrate(for Mo film) In-situ temperature monitoring software of depositing CIGS film Substrate : Glass and flexible metal,100mm x 100mm Deposition : Mo film deposition by DC magnetron sputtering method CIGS film deposition by MBE intrinsic and n type ZnO film by RF magnetron sputtering method Throught put : 100mm x 100mm x 1 sheet / batch, using by load lock Vacuum chamber : Six-Way Transfer chamber, Loadlock chamber, MBE chamber, Mo and ZnO sputtering chamber 註1：上記は例であり、客先の要求仕様に応じ、カスタムで設計します。 |
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･太陽電池用CIGS薄膜形成 |
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